An electrothermal microlens scanner with low-voltage large-vertical-displacement actuation

A. Jain, Huikai Xie
2005 IEEE Photonics Technology Letters  
This letter reports the design, fabrication, and operation of a microlens scanner that can perform large vertical scans at low actuation voltages. Photoresist (PR) reflow technique was used to form a 210-m-diameter PR microlens on a lens holder which is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a maskless deep-reactive-ion-etch complementary-metal-oxide-semiconductor microelectromechanical systems process. A maximum static vertical
more » ... static vertical displacement of 280 m is achieved with a 700 by 320 m LVD device at a low actuation voltage of 10 V. The microlens has a focal length of 188 m, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz. Index Terms-Electrothermal actuation, large-verticaldisplacement (LVD) microactuator, microelectromechanical systems (MEMS), microlens scanner, optical imaging.
doi:10.1109/lpt.2005.853223 fatcat:janlisovxrhfdk4mpnqk7jv5mq