The Error of Aberration Measurements in HRTEM Using Zemlin Tableaus

Markus Lentzen, Andreas Thust, Knut Urban
2004 Microscopy and Microanalysis  
In modern high-resolution transmission electron microscopy lens aberrations, in particular the strong third-order spherical aberration of the objective lens, severely limit the conditions for a directly interpretable imaging of object structures. In recent years hardware aberration correction [1] and software aberration correction of reconstructed exit wave functions [2, 3] have become feasible, thus fully exploiting the information limit of an instrument. Both methods require an accurate
more » ... e an accurate aberration measurement which is used to align the lens corrector [1, 4] or to correct an experimental exit wave function numerically [2, 3] . A number of instruments have approached information limits of 0.1 nm, or below, and nextgeneration transmission electron microscopes will advance to resolutions where already fifth-order aberrations play a role, requiring the measurement of 25 independent aberration coefficients.
doi:10.1017/s1431927604883922 fatcat:4mgiic66nnfufa6mbmo7k6i7xi