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Modelling of narrow-width SOI devices
2004
Semiconductor Science and Technology
The ultimate limits in scaling of conventional MOSFET devices have led the researchers to look for novel device concepts such as dual-gate SOI devices, FinFETs, focused ion beam MOSFETs, etc. These novel devices suppress some of the short channel effects exhibited by conventional MOSFETs. However, a lot of the old issues remain and new issues begin to appear. For example, in both dual-gate SOI MOSFETs and in FinFET devices, quantum mechanical size-quantization effects significantly affect the
doi:10.1088/0268-1242/19/4/046
fatcat:uh3dszgxs5fbfcf332ht6zycjy