Quasi Three-Dimensional Simulation of Heat Transport in Thermal-Based Microsensors [chapter]

A. Nathan, N. R. Swart
1995 Simulation of Semiconductor Devices and Processes  
12esults based on quasi three-dimensional numerical solutions of electrothermal behaviour in thermally isolated microstructures are presented. Here, we solved the two-dimensional system of electrothermal equations with heat loss to the surrounding (due to natural convection) incorporated as a mixed boundary condition. The convective heat loss was calculated based on a three-dimensional solution to the heat conduction equation using a boundary element method. The technique, employed in the
more » ... ployed in the analysis of heat transfer in a p-Pirani gauge, yields numerical soultions which provide good agreement with measurement data.
doi:10.1007/978-3-7091-6619-2_7 fatcat:bho4yaso6zgepn5fpqq6doywmm