Micro-Fabrication of Single Crystal Silicon by Using Combination Technique of Nano-scale Machining and Alkaline Etching (2nd Report)

Noritaka KAWASEGI, Guoxin LIAO, Noboru MORITA, Shigeru YAMADA, Noboru TAKANO, Tatsuo OYAMA, Kiwamu ASHIDA
2004 Journal of the Japan Society for Precision Engineering Contributed Papers  
This study aims to fabricate 3 dimensional microstructures on single crystal silicon by nano scale machining using mechanism of friction force microscope (FFM) and subsequent alkaline etching. Machined area by diamond tip acts as a mask against KOH solution because of formation of amorphous layer, and consequently microstructure can be fabricated. The influence of machining conditions on masking effect is studied. As a result, it is found that masking effect can be controlled by adjusting
more » ... load and pitch of machining line. In this way, mechanism of height change is investigated, and also 3 dimensional microstructure can be fabricated with precise control of machining parameters.
doi:10.2493/jspe.70.1544 fatcat:dt7auvnh2bauvi7hn7vt57h7by