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Proceedings of the 2002 American Control Conference (IEEE Cat. No.CH37301)
This paper presents t h e design, identification and control of a nanopositioning device. T h e device is actuated by a piezoelectric stack and its motion is sensed by a Linear Variable Differential Transformer (LVDT). A fourth order single input single output model has been identified to describe its dynamics. It is demonstrated t h a t PI control law does not meet the bandwidth requirements for positioning. This motivated the design and implementation of a n ' H , controller whichdoi:10.1109/acc.2002.1023923 fatcat:f2akqopxcve4nesthz4wmrw3yi