Design, identification and control of a fast nanopositioning device

S. Salapaka, A. Sebastian, J.P. Cleveland, M.V. Salapaka
2002 Proceedings of the 2002 American Control Conference (IEEE Cat. No.CH37301)  
This paper presents t h e design, identification and control of a nanopositioning device. T h e device is actuated by a piezoelectric stack and its motion is sensed by a Linear Variable Differential Transformer (LVDT). A fourth order single input single output model has been identified to describe its dynamics. It is demonstrated t h a t PI control law does not meet the bandwidth requirements for positioning. This motivated the design and implementation of a n ' H , controller which
more » ... r which demonstrates substantial improvements in t h e positioning speed and precision besides eliminating t h e undesirable nonlinear effects of t h e actuator. T h e characterization of the device in terms of bandwidth, resolution, and repeatability is also shown.
doi:10.1109/acc.2002.1023923 fatcat:f2akqopxcve4nesthz4wmrw3yi