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2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
One of the main design limitations of resonant micro-mirrors intended for visual projection display applications is inertia-driven dynamic deformation. Micro-mirrors used for high frequency (20-30 kHz) laser beam scanning are typically operated at resonance in the region of their torsional modal frequency in order to achieve high scan angles. Although the optical resolution of the projected image is defined by the micromirror frequency, maximum scan angle and dimensions, significant dynamicdoi:10.1109/dtip.2017.7984467 fatcat:ckklowxyqbhejg2qbvzf4xxvxy