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Integrated Photonics Research and Applications/Nanophotonics for Information Systems
The shortest integrated polarization converter realized by a fully optical lithography is reported. It uses a single waveguide with one slanted side and one vertical wall. An optical 5x reduction wafer stepper with high numerical aperture (≥ 0.48) is used for exposure at 365 nm wavelength. Specified resolution is 0.4µm and overlay-accuracy is ≤60 nm. Vertical side of the converter is realized by reactive ion etching and slanted side by wet chemical etching. The polarization converter length isdoi:10.1364/ipra.2005.iwa3 fatcat:gl3slgg36ze3hl4mcefqletisi