Ultrashort Polarization Converter on InP/InGaAsP Fabricated by Optical Lithography

U Khalique, Y C. Zhu, J J. van der Tol, L M. Augustin, R Hanfoug, F H. Groen, P J. van Veldhoven, M K. Smit, M van de Moosdijk, W de Laat, K Simon
2005 Integrated Photonics Research and Applications/Nanophotonics for Information Systems   unpublished
The shortest integrated polarization converter realized by a fully optical lithography is reported. It uses a single waveguide with one slanted side and one vertical wall. An optical 5x reduction wafer stepper with high numerical aperture (≥ 0.48) is used for exposure at 365 nm wavelength. Specified resolution is 0.4µm and overlay-accuracy is ≤60 nm. Vertical side of the converter is realized by reactive ion etching and slanted side by wet chemical etching. The polarization converter length is
more » ... onverter length is 125 µm and conversion efficiency is higher than 95%, which is better than the best known polarization converters on InP/InGaAsP until now.
doi:10.1364/ipra.2005.iwa3 fatcat:gl3slgg36ze3hl4mcefqletisi