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Aligned pipe arrays formation by silicon anodic etching
1998
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
Enhancement of the quantum efficiency and stability of electroluminescence from porous silicon by anodic passivation Appl. A simple technique is described here that produces aligned curved or straight arrays of pipes. This opens the way to produce complete systems ͑electronic, photonic and fiber optic connectors͒ from silicon with large scale fabrication techniques. Our strategy in creating parallel pipes is to use high current densities ͑ϳ100 mA/cm 2 ) silicon anodization in HF solutions, in a
doi:10.1116/1.590136
fatcat:lttts2y6encenbwtuex7ci7l5e