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36th AIAA Fluid Dynamics Conference and Exhibit
Numerical investigations of the gas flow structure and the gas-damping force on moving and heated microbeams are carried out using the Navier-Stokes equations with first-order velocity-slip and temperature-jump boundary conditions (the NSSJ method) and two kinetic numerical techniques: the particle-based direct simulation Monte Carlo (DSMC) method, and a deterministic discrete-ordinate solution of the ellipsoidal statistical (ES) kinetic model equation. The gas-damping coefficients on a movingdoi:10.2514/6.2006-3715 fatcat:zowuk54wvbeapn6hgbaawdz3gu