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Impact of Ultra-Low-Voltage, Ultra-High Resolution Scanning Electron Microscopy for Nano-Surface Analysis: Examination and Analysis of Nano-inclusions in a Type 304 Stainless Steel
Journal of the Vacuum Society of Japan
For successful application of low-voltage, ultra-high resolution scanning electron microscopy for nano-surface analysis, sample surface preparation is of key importance. Here, this is demonstrated through the examination ofˆne inclusions in a type 304 stainless steel. Inclusions are mostly MnS, TiO 2 , Al 2 O 3 and TiN; they are present either in isolation or forming clusters of two, three, or four features. With the use of mirror-ˆnished surfaces, prepared by mechanical polishing using adoi:10.3131/jvsj2.54.275 fatcat:346lu6ngfrhxlpanb2i4qisgj4