Impact of Ultra-Low-Voltage, Ultra-High Resolution Scanning Electron Microscopy for Nano-Surface Analysis: Examination and Analysis of Nano-inclusions in a Type 304 Stainless Steel

Kenichi SHIMIZU, Tomoaki MITANI
2011 Journal of the Vacuum Society of Japan  
For successful application of low-voltage, ultra-high resolution scanning electron microscopy for nano-surface analysis, sample surface preparation is of key importance. Here, this is demonstrated through the examination ofˆne inclusions in a type 304 stainless steel. Inclusions are mostly MnS, TiO 2 , Al 2 O 3 and TiN; they are present either in isolation or forming clusters of two, three, or four features. With the use of mirror-ˆnished surfaces, prepared by mechanical polishing using a
more » ... sion of colloidal silica, these inclusions were not revealed clearly due to the presence, at the surface, of thin contaminant layers. After removal of such contaminant layers by radio-frequency-powered glow discharge sputtering, however, inclusions were revealed at the clarity never seen before. By sputtering, thin contaminant layers are removed successfully, without formation of new altered surface layers. Simultaneously, sputtering gener-atesˆne textures over the surface of inclusions that are directly related to their compositions. Through the use of such sputter-induced textures, compositional variations in mixed inclusions of sizes even below 50 nm can be revealed clearly and at a high lateral resolution of ~1 nm.
doi:10.3131/jvsj2.54.275 fatcat:346lu6ngfrhxlpanb2i4qisgj4