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Design and fabrication of a large vertical travel silicon inchworm microactuator for the Advanced Segmented Silicon Space Telescope
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
Future concepts for ultra-large lightweight space telescopes include the telescopes with segmented silicon mirrors. This paper describes a proof-of-concept inchworm actuator designed to provide nanometer resolution, high stiffness, large output force, long travel range, and compactness for ultraprecision positioning applications in space. A vertically actuating inchworm microactuator is proposed to acheve large actuation travel by incorporating compliant beam structures within a silicon wafer.doi:10.1117/12.476282 fatcat:ctrn6mwayvadzmiklmg3y7owji