The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
We have investigated the diffusion of hydrogen through the oxide and silicon of our singlewafer vacuum package. We have encapsulated micromechanical silicon resonators in vacuum beneath a 20 µm polysilicon layer. While we have not been able to measure any change in pressure of parts at room temperature over a period of nine months, we have been able to accelerate the diffusion of hydrogen through the encapsulation using elevated temperatures. While placing encapsulated resonators in elevateddoi:10.1109/sensor.2005.1496568 fatcat:53gvqkj555fcnmsh6ndoz3nu6u