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Improving silicon nitride ring resonator performances on 300 mm industrial environment for point of care applications (Conference Presentation)
2020
Biophotonics in Point-of-Care
Point-of-care tests (POCT) are important for detecting illnesses and monitoring patients without the need of a medical laboratory. To be useful, POCT must be sensitive, specific, integrated, and affordable. Since the early 2000s, integrated photonics have offered a possible solution for this problem. In particular, silicon micro-ring resonators represent a compact and sensitive choice known in the industry. This paper details the design, fabrication, and characterization of two methods for
doi:10.1117/12.2555339
fatcat:fijaorrcdbd3da3obgbwu66cwm