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MEMS-ENABLED RETARDING POTENTIAL ANALYZERS FOR HYPERSONIC IN-FLIGHT PLASMA DIAGNOSTICS
2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest
We report the design, fabrication, and preliminary characterization of a microfabricated retarding potential analyzer (RPA) that ensures unprecedented grid alignment accuracy. Through refined manufacturing methods, improved tolerances upon assembly serve to increase the signal to noise ratio (SNR). Furthermore, microfabrication permits smaller features overcoming sensor limitations previously barring RPAs from use in very dense plasmas such as those during reentry. Preliminary results show moredoi:10.31438/trf.hh2012.86 fatcat:bpuu2mybbrhkfh4bj5cfh3paie