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MEMS-ENABLED RETARDING POTENTIAL ANALYZERS FOR HYPERSONIC IN-FLIGHT PLASMA DIAGNOSTICS

E.V. Heubel, A.I. Akinwande, L.F. Velásquez-García
2012 2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest   unpublished

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We report the design, fabrication, and preliminary characterization of a microfabricated retarding potential analyzer (RPA) that ensures unprecedented grid alignment accuracy. Through refined manufacturing methods, improved tolerances upon assembly serve to increase the signal to noise ratio (SNR). Furthermore, microfabrication permits smaller features overcoming sensor limitations previously barring RPAs from use in very dense plasmas such as those during reentry. Preliminary results show more
more » ... than a twofold increase in signal strength compared to conventional RPAs. Finally, a new batch-fabricated RPA design that uses MEMS springs for grid assembly is demonstrated to help drive down cost while improving device reliability.
doi:10.31438/trf.hh2012.86 fatcat:bpuu2mybbrhkfh4bj5cfh3paie
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E.V. Heubel, A.I. Akinwande, L.F. Velásquez-García. "MEMS-ENABLED RETARDING POTENTIAL ANALYZERS FOR HYPERSONIC IN-FLIGHT PLASMA DIAGNOSTICS." 2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest (2012)