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A Smart Flow Sensor for Flow Direction Measurement
2008
Advanced Materials Research
The purpose of this paper is to apply MEMS techniques to manufacture a gas flow sensor that consists with an airflow rate and airflow direction sensing units for detection of airflow states. This study uses a silicon wafer as a substrate which is deposited silicon nitride layers. To form the airflow rate sensing unit, a micro heater and a sensing resistor are manufactured over a membrane that released by a back-etching process. The airflow direction sensing unit is made of four cantilever beams
doi:10.4028/www.scientific.net/amr.47-50.189
fatcat:jeuk3gj27rcypg2cdqnw7twlsu