Effects of forming gas anneal on ultrathin InGaAs nanowire metal-oxide-semiconductor field-effect transistors

Mengwei Si, Jiangjiang J. Gu, Xinwei Wang, Jiayi Shao, Xuefei Li, Michael J. Manfra, Roy G. Gordon, Peide D. Ye
2013 Applied Physics Letters  
2013. Effects of forming gas anneal on ultrathin InGaAs nanowire metaloxide-semiconductor field-effect transistors. Applied Physics Letters 102(9): 093505. Published Version
doi:10.1063/1.4794846 fatcat:alqsrhbxofcx5iq6p33xwihoge