Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry

Taher M. El-Agez, David M. Wieliczka, Chris Moffitt, Sofyan A. Taya
2011 Journal of Atomic, Molecular, and Optical Physics  
Oxygen-treated trimethylsilane (TMS) plasma-polymerized films are investigated using rotating polarizer and analyzer ellipsometer. Aging process and composition of the samples are studied. Coordinated X-ray photoelectron spectroscopy (XPS) depth profiling studies on these films is presented for more detailed understanding of the aging process as well as the modeling of these films.
doi:10.1155/2011/295304 fatcat:itdzag7puzcvrpkoadugbxuz2e