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Shape measurement of submicrometer- rough surface without specular reflected light (1st report)
Shape measurement of submicrometer-rough surface without specular reflected light (1st report) Komatsu University, Faculty of Production Systems Engineering and Science, Masaaki ADACHI We are developing 3D-shape measurement technique using speckle interferometer. The technique uses a tunable laser and captures reflected-light images with a 2D-camera. Using diffusely reflected light, it is possible to measure the shape of all surfaces having any direction. When the surface to be measured woulddoi:10.11522/pscjspe.2021s.0_565 fatcat:w2lcoi3sxbbpxhlswiwvc4qeqq