A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2022; you can also visit the original URL.
The file type is application/pdf
.
Shape measurement of submicrometer- rough surface without specular reflected light (1st report)
鏡面反射光を使わないサブミクロン平面の形状測定(その1)
鏡面反射光を使わないサブミクロン平面の形状測定(その1)
Shape measurement of submicrometer-rough surface without specular reflected light (1st report) Komatsu University, Faculty of Production Systems Engineering and Science, Masaaki ADACHI We are developing 3D-shape measurement technique using speckle interferometer. The technique uses a tunable laser and captures reflected-light images with a 2D-camera. Using diffusely reflected light, it is possible to measure the shape of all surfaces having any direction. When the surface to be measured would
doi:10.11522/pscjspe.2021s.0_565
fatcat:w2lcoi3sxbbpxhlswiwvc4qeqq