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A trap generation statistical model with the trap sphere radius as parameter has been newly formulated in closed-form for intrinsic breakdown of ultrathin oxides and, by incorporating the trap filling fraction as the secondary parameter, can be practically useful in a manufacturing process. Experimental reproduction for different oxide thicknesses and areas has been achieved through the model. A certain criterion has readily been drawn from the model, with which the ultimate thickness limit fordoi:10.1109/16.925260 fatcat:4l7jqc4mzvdthiy7b4geyfnnyu