Interferometric microscope with true color imaging

J. L. Beverage, X. Colonna de Lega, M. F. Fay, Katherine Creath, Jan Burke, Joanna Schmit
2014 Interferometry XVII: Techniques and Analysis  
Optical 3D profilers based on Coherence Scanning Interferometry (CSI) provide high-resolution non-contact metrology for a broad range of applications. Capture of true color information together with 3D topography enables the detection of defects, blemishes or discolorations that are not as easily identified in topography data alone. Uses for true color 3D imaging include image segmentation, detection of dissimilar materials and edge enhancement. This paper discusses the pros and cons of color
more » ... and cons of color capture using standard color detectors and presents an alternative solution that does not rely on color filters at the camera, thus preserving the high lateral and vertical resolution of CSI instruments.
doi:10.1117/12.2063264 fatcat:36ck46gq7beobpmkbnoy3owkc4