ASPECTS OF DOUBLE MASS ON TUNING FORK MEMS GYROSCOPE

Shweta Shingare, S Naveed, Anil Chaitali, Muley
2013 Communication & Instrumentation Engineering Research   unpublished
MEMS gyroscope provides high performance and low cost for improving directional estimation and overall accuracy in the navigation systems. This paper presents a double mass tuning fork gyroscope (TFG) to improve their sensitivity and better resolution. The perforated proof mass [1] used in the design enables the reduction of the damping effect. This gyroscope has two modes-drive mode and sense mode. The driving force is given in the x direction and the displacement due to the Coriolis Effect is
more » ... Coriolis Effect is sensed in the y-direction. The device is driven at its natural frequency and the response of the device is analyzed at static and dynamic state. The TFG produced a better displacement 5.2 × 10-9 m after applying force. The frequency range applied is 0.053-0.24 MHz. to get better resolutions and displacement.
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