Electrostatically-actuated micro cantilevers for electro-mechanical measurement of single-walled carbon nanotubes grown by catalytic CVD

K. Hoshino, Y. Murakami, S. Maruyama, K. Matsumoto, I. Shimoyama
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest  
We have build a system for real-time in-situ measurement of electromechanical properties of single-walled carbon nanotubes (SWNTs) growing between electrostatically actuated silicon cantilevers faced each other with a micrometer-order gap. Our catalytic CVD method using ethanol as a carbon source was employed along with a newly developed technique that can synthesize SWNTs directly on the surface of Si substrate at the CVD temperature of as low as 650 °C. SWNTs were successfully grown between
more » ... e 10-micrometer gap of the measuring probes. Mechanical properties of the probing cantilevers under the CVD condition were then measured to assess the feasibility of real-time measurement of SWNT growth.
doi:10.1109/mems.2004.1290618 fatcat:cxinjfyj6feahandiktc3chf2e