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Electrostatically-actuated micro cantilevers for electro-mechanical measurement of single-walled carbon nanotubes grown by catalytic CVD
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest
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We have build a system for real-time in-situ measurement of electromechanical properties of single-walled carbon nanotubes (SWNTs) growing between electrostatically actuated silicon cantilevers faced each other with a micrometer-order gap. Our catalytic CVD method using ethanol as a carbon source was employed along with a newly developed technique that can synthesize SWNTs directly on the surface of Si substrate at the CVD temperature of as low as 650 °C. SWNTs were successfully grown between
doi:10.1109/mems.2004.1290618
fatcat:cxinjfyj6feahandiktc3chf2e