High performance bulk acoustic resonator based on ZnO:Li piezofilms with high crystallinity and uniformity

Chun-Cheng Lin, Jian-Fu Tang, Sheng-Yuan Chu
2013 2013 IEEE 8th Nanotechnology Materials and Devices Conference (NMDC)  
This article describes a bulk acoustic resonator (BAR) based on Pt/L 0.06 Z 0.94 O/Pt/Ti/SiO 2 /Si structure. The L 0.06 Z 0.94 O piezofilms are grown by radio frequency magnetron sputtering system and post-treated with UV-ozone illumination. The structural and chemical evolutions through various illumination times of the predominantly c-axis orientation LZO films are investigated. The largest piezoelectric coefficient (14.87 pm/V) of the LZO film is obtained for 120 min UV-ozone illumination,
more » ... zone illumination, which is attributed to better crystallization and fewer oxygen-related defects. Furthermore, we adopt the wet chemical etching method and the lift-off process to pattern the piezofilms and electrodes of the device, respectively. The fabricated resonator exhibits high quality factor (Q = 1112) at ~500 MHz. The experimental results verify the crystallinity and the uniformity of the piezofilms play crucial roles of the BAR devices.
doi:10.1109/nmdc.2013.6707456 fatcat:custnuq3h5dpxifbgt6ho6llxi