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The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE
This paper presents a 600kHz MEMS handpass filter implemented using electrical coupling of single crystal silicon HARPSS micromechanical resonators. Passive and active filter synthesis approaches based on electrical coupling of capacitive MEMS resonators are introduced and discussed. A third order passive bandpass filter at the center frequency of 600kHz with a bandwidth of 125Hz, a stopband rejection of 48dB, and a 20dB-shape-factor of 2.1 is demonstrated. A quality factor (Q) enhancementdoi:10.1109/memsys.2003.1189846 fatcat:rutlscyjmje2tm4om4xkwzph3m