A 600 kHz electrically-coupled MEMS bandpass filter

S. Pourkamali, R. Abdolvand, F. Ayazi
The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE  
This paper presents a 600kHz MEMS handpass filter implemented using electrical coupling of single crystal silicon HARPSS micromechanical resonators. Passive and active filter synthesis approaches based on electrical coupling of capacitive MEMS resonators are introduced and discussed. A third order passive bandpass filter at the center frequency of 600kHz with a bandwidth of 125Hz, a stopband rejection of 48dB, and a 20dB-shape-factor of 2.1 is demonstrated. A quality factor (Q) enhancement
more » ... Q) enhancement technique based on active electrical cascading of the resonators is also presented. A 3-stage active cascade at 600kHz demonstrated a 2x increase in the effective Q.
doi:10.1109/memsys.2003.1189846 fatcat:rutlscyjmje2tm4om4xkwzph3m