In a precision positioning stage of an electronic device manufacturing equipment , the mechanical resonanI mode changes during transference or re − assembling ofthe equipment , We propose a notch filter design method in this paper that suppresses the posltioning performance change by focusing on the mechanical resonant mode change . This method is also effective at suppressing the servo characteristic difference caused by the positioning coordinate in stages that have a large movable range . We

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... conducted simulations to confirm that the positioning performance when the mechanical rcsonant mode changes . It was Iess than 3% that the difference between the original performancc and one which was using this method .