A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2004; you can also visit the original URL.
The file type is application/pdf.
Low-power micromachined microsystems
ISLPED'00: Proceedings of the 2000 International Symposium on Low Power Electronics and Design (Cat. No.00TH8514)
Preserved Fulltext
Micromachined microsystems and Micro Electro Mechanical Systems (MEMS) have made possible the development of highly accurate and portable sensors and instrument for a variety of applications in the health care, industrial, consumer products, avionics, and defense. Design of low-power circuits for these applications, and use of micromachined sensors and actuators in combination with integrated circuits to implement even lower power microinstruments has now become possible and the focus of
doi:10.1109/lpe.2000.876748
fatcat:aty3kutv4vcpdjdyovae5jslxq