Low-power micromachined microsystems

K. Najafi
ISLPED'00: Proceedings of the 2000 International Symposium on Low Power Electronics and Design (Cat. No.00TH8514)  
Micromachined microsystems and Micro Electro Mechanical Systems (MEMS) have made possible the development of highly accurate and portable sensors and instrument for a variety of applications in the health care, industrial, consumer products, avionics, and defense. Design of low-power circuits for these applications, and use of micromachined sensors and actuators in combination with integrated circuits to implement even lower power microinstruments has now become possible and the focus of
more » ... on. This paper reviews the state of the art in the development of micromachined microsystems and MEMS, discusses low-power design approaches for microsystems, and reviews some recent development in power generation and energy harvesting from the environment.
doi:10.1109/lpe.2000.876748 fatcat:aty3kutv4vcpdjdyovae5jslxq