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Modulated IR radiometry as a tool for the thickness control of coatings
2010
Journal of Physics, Conference Series
The thickness of coatings can be determined using the data measured by Modulated IR Radiometry for sets of coatings, produced under specific controlled conditions: -Keeping constant all deposition parameters except the deposition time, coatings of approximately constant thermal transport properties, but different thickness are produced. The modulated IR phase lag signals measured for the coatings are calibrated with the help of signals obtained for homogeneous opaque reference samples of smooth
doi:10.1088/1742-6596/214/1/012081
fatcat:afv5vqxstzbfldxvqbk6ong3pi