Reduction of Defect Fluxes Using Dual-Ion-Beam Processing

A. Iwase, L. E. Rehn, P. M. Baldo, P. R. Okamoto, H. Wiedersich, L. Funk
1993 Materials Research Society Symposium Proceedings  
doi:10.1557/proc-316-57 fatcat:lpw4mfhvnneyhiie23wjxmmb2y