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L-SHAPED CANTILEVER PARALLEL - PLATE MEMS ACCELEROMETER DESIGN PARAMETERS USING A GRAVITATIONAL SEARCH ALGORITHM
2015
International Journal on Smart Sensing and Intelligent Systems
Due to their small size, low weight, low cost and low energy consumption, MEMS (Micro Electro-Mechanical Systems) accelerometers have achieved great commercial success in recent decades. The objective of this paper is to find the optimum design for a typical MEMS accelerometer, which satisfies a set of given constraints. Due to the complex nature of the problem, a gravitational search algorithm (GSA) is developed for optimization. The GSA attempts to optimize the inter-plate gap while
doi:10.21307/ijssis-2017-749
fatcat:ljz2v6a4pngupa5pbsqnhfsonm