A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL.
The file type is application/pdf
.
A 100 V-IC for the remote powering and control of a microrobot using an electrostatic ciliary motion system
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
For the first time a high-voltage IC, specially dedicated to the remote powering and the control by inductive coupling of electrostatic actuators, has been designed and successfully tested. Four actuators can be controlled simultaneously with a maximum actuation voltage of 100 V. As a preliminary test, a capacitive load of 220 pF has been driven at a frequency of 100 Hz with an output voltage of 30 V and a distance of 2.5 cm between emitter and receiver antennas. To avoid the electrostatic
doi:10.1109/sensor.2003.1217114
fatcat:uhyjqln75fghvpcltfz3gfnmla