A 100 V-IC for the remote powering and control of a microrobot using an electrostatic ciliary motion system

P. Basset, A. Kaiser, B. Stefanelli, M. Walenne, D. Collard, L. Buchaillot
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)  
For the first time a high-voltage IC, specially dedicated to the remote powering and the control by inductive coupling of electrostatic actuators, has been designed and successfully tested. Four actuators can be controlled simultaneously with a maximum actuation voltage of 100 V. As a preliminary test, a capacitive load of 220 pF has been driven at a frequency of 100 Hz with an output voltage of 30 V and a distance of 2.5 cm between emitter and receiver antennas. To avoid the electrostatic
more » ... electrostatic stiction of mobile parts, the IC alternates the polarity of the actuation voltage. The possibility to control 4 highly capacitive actuators independently makes this circuit suitable for the remote control of a two degrees of freedom electrostatic Ciliary Motion System (CMS). The chip has been fabricated using European multi-chip service (EUROPRACTICE) in the Alcatel-Mietec I2T100 technology. Its dimensions are 5*3 mm 2 .
doi:10.1109/sensor.2003.1217114 fatcat:uhyjqln75fghvpcltfz3gfnmla