Transient characteristics of BCB encapsulated surface micromachined aluminum micro-mechanical resonators

S. Pamidighantam
Proceedings of 6th Electronics Packaging Technology Conference (EPTC 2004) (IEEE Cat. No.04EX971), Phone: 0091 80 23600654, extn:3 14. Abstract In this contribution, the transient characteristics of Benzo Cyclo Butene (BCB) encapsulated Aluminum (AI) micro mechanical resonators as a function of time varying pressure are studied. The quality factor of encapsulated AI resonator showed a drastic change with time of mowthan 200% reduction. The estimated transient leak rate spans over several orders of magnitude to 10~9 atm cm3 s-'). A theoretical description of
more » ... AI micro mechanical resonator and the leak rate are presented. Possible causes for the leak rate and the potential solutions are also outlined.
doi:10.1109/eptc.2004.1396599 fatcat:eihasu2bgrdrhcpq2g44smxgz4