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Proceedings of 6th Electronics Packaging Technology Conference (EPTC 2004) (IEEE Cat. No.04EX971)
Email:firstname.lastname@example.org, Phone: 0091 80 23600654, extn:3 14. Abstract In this contribution, the transient characteristics of Benzo Cyclo Butene (BCB) encapsulated Aluminum (AI) micro mechanical resonators as a function of time varying pressure are studied. The quality factor of encapsulated AI resonator showed a drastic change with time of mowthan 200% reduction. The estimated transient leak rate spans over several orders of magnitude to 10~9 atm cm3 s-'). A theoretical description ofdoi:10.1109/eptc.2004.1396599 fatcat:eihasu2bgrdrhcpq2g44smxgz4