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Surface micromachined solenoid on-Si and on-glass inductors for RF applications
1999
IEEE Electron Device Letters
RF performance of surface micromachined solenoid on-chip inductors fabricated on a standard silicon substrate (10 1 cm) has been investigated and the results are compared with the same inductors on glass. The solenoid inductor on Si with a 15-m thick insulating layer achieves peak quality (Q0) factor of 16.7 at 2.4 GHz with inductance of 2.67 nH. This peak Q-factor is about two-thirds of that of the same inductor fabricated on glass. The highest performance has been obtained from the
doi:10.1109/55.784461
fatcat:gqwjq6ddwzgtld3txhdjmzrx7i