A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2021; you can also visit the original URL.
The file type is application/pdf
.
ADAPTATION OF THE SMM-2000 INSTALLATION TO STUDENTS SCIENTIFIC WORKS ON STUDYING THE SURFACE OF VARIOUS MATERIALS
2020
BULLETIN Series of Physics & Mathematical Sciences
This paper presents the capabilities of the device "Scanning multi-microscope SMM-2000" as one of the most modern methods for measuring the characteristics of materials and diagnostics of features of small-size systems. The SMM-2000 scanning multi-microscope is designed for measuring geometric and physical parameters of the surface topography of samples with nanometer spatial resolution. The principle of operation of the device is briefly described and the parameters of manual and automatic
doi:10.51889/2020-4.1728-7901.22
fatcat:ssmzzw44d5aefiwvfokwyytl3a