Erratum:In situspectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd (2016J. Phys. D: Appl. Phys.49115504)

N Leick, J W Weber, A J M Mackus, M J Weber, M C M van de Sanden, W M M Kessels
2016 Journal of Physics D: Applied Physics  
ERRATUM Erratum: In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd (2016 J. Phys. D: Appl. Phys. 49 115504) To cite this article: N Leick et al 2016 J. Phys. D: Appl. Phys. 49 269601 View the article online for updates and enhancements. Related content Errata Yu A Aminov -Erratum -ERRATA V V Zhikov -This content was downloaded from IP address 207.241.231.82 on 24/07/2018 at 02:14 1 Erratum: In situ spectroscopic ellipsometry during atomic layer deposition of Pt,
more » ... r deposition of Pt, Ru and Pd (2016 J. Phys. D: Appl. Phys. 49 115504)
doi:10.1088/0022-3727/49/26/269601 fatcat:v55orhxyvjapvpv5alf5rfwr7u