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Growth Rate Reproducibility for Magnesium Fluoride Films by Sputtering
When Magnesium fluoride was sputtered by conventional techniques, molecular dissociation into Mg and F, and thus fluorine deficiency and optical absorption occured. We have found that sputtering in the form of molecules occured at high temperature of the Magnesium fluoride target. We have named this method K-M-S (Keep-Molecules S puttering) .doi:10.3131/jvsj.46.624 fatcat:aiypexk7urdq7kkzej5gqjqj4e