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A self-consistent numerical model for silicon-based field effect nanowire biosensors is developed to study the impact of various surface-related physical and chemical processes, including transport of semiconductor carriers and electrolyte mobile ions, protonation and deprotonation of surface charge groups, and charges, and orientations and surface binding dynamics of immobilized biomolecules. It is shown that the sensing signal levels are affected by the gate biasing points, nonlineardoi:10.1063/1.3156657 fatcat:tdbyluh5gbfu5mdxiephrxdefe