Magnification of interferogram with the use of digital holography

Vladimir Ivanov, Sergey Pul'kin, Alexander Sevryugin, Vladimir Venediktov
2014 2014 International Conference Laser Optics  
The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases.
doi:10.1109/lo.2014.6886309 fatcat:hfxt67akxnetlmgn44uvkjjktq