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The nonuniformity of local temperature, voltage and current in the high temperature proton exchange membrane fuel cell stack can accelerate the aging of membrane electrode assembly (MEA) and the failure of overall fuel cell stack. This study used micro-electro-mechanical systems (MEMS) technology to integrate micro temperature, voltage and current sensors into a 40μm thick stainless steel substrate, the flexible multiple micro sensor was embedded in the high temperature fuel cell stack fordoi:10.20964/2017.06.14 fatcat:gjvm4zkq7fgdxoy3xi24ahrwci