Comparison of techniques for bonding VCSELs directly to ICs

Rui Pu, Eric M. Hayes, Carl W. Wilmsen, Kent D. Choquette, Hong Q. Hou, Kent M. Geib, Pierre H. Chavel, David A. B. Miller, Hugo Thienpont
1998 Optics in Computing '98  
This paper reports the successful bonding of 8 x 8 and 4 x 4 VCSEL arrays to Si CMOS and GaAs MESFET integrated circuits and to GaAs substrates. Three different bonding techniques are demonstrated and their electrical, optical and lmechanical characteristics are compared. All three techniques remove the substrate from the VCSEL wafer, leaving individual VCSELS bonded directly to locations within the integrated circuit.
doi:10.1117/12.308861 fatcat:ps7a6e4f7rhg5g5azvo2krqwd4