14-6 200ns-Excimer-Laser Pulse : a Way Toward Optimization of the Crystallization of Amorphous Silicon for Flat Panel Display Applications(4.Session 14:AMLCD 2)

C. Prat, E. Fogarassy
1999 ITE Technical Report  
doi:10.11485/itetr.23.67.0_28 fatcat:fzsvoed3bnbspczndioapdxta4