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A Simulation Framework for the Performance Assessment of Shop-Floor Control Systems
2003
Simulation (San Diego, Calif.)
The authors discuss the concept and design criteria for a framework that facilitates the performance assessment of shop-floo control systems. Their basic concept includes a simulation model that emulates the shop floo of a wafer fab, sends information to the control system, and receives information back from the control system. The shop-floo control system is realized as a separate module that interfaces to the simulator via a data layer that contains the current shop-floo status and the
doi:10.1177/0037549703256039
fatcat:gvlgoxm63zfuba4d3sptyw22ay