SAW Temperature Sensors with Stable and Robust Electrical Response Versus Environmental Parameters

Marianne Sagnard, Thierry Laroche, Sylvain Ballandras
Surface acoustic wave (SAW) devices are often used to monitor environmental parameters. In order to ensure the continuity of the frequency response versus these parameters-namely, to remove the effects of directivity, transducers working out of the Bragg conditions are studied. Then, it is shown that the multimodal nature of the acoustic cavity can be exploited to design monolithic temperature SAW sensors.