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Monolithic Suspended Optical Waveguides for InP MEMS
2004
IEEE Photonics Technology Letters
We present a novel waveguide design for InP microelecromechanical systems. The substrate is removed from underneath the waveguide by sacrificial etching, and the suspended waveguide is supported by lateral tethers. This allows segments of the waveguide to be moved and prevents substrate leakage loss in the fixed segments of the waveguides. A single-mask fabrication process is developed that can be extended to more complex devices employing electrostatic actuation. Fabricated suspended
doi:10.1109/lpt.2004.826075
fatcat:bf4weimbszfjzpdmkiifdxdhnq