Monolithic Suspended Optical Waveguides for InP MEMS

D.P. Kelly, M.W. Pruessner, K. Amarnath, M. Datta, S. Kanakaraju, L.C. Calhoun, R. Ghodssi
2004 IEEE Photonics Technology Letters  
We present a novel waveguide design for InP microelecromechanical systems. The substrate is removed from underneath the waveguide by sacrificial etching, and the suspended waveguide is supported by lateral tethers. This allows segments of the waveguide to be moved and prevents substrate leakage loss in the fixed segments of the waveguides. A single-mask fabrication process is developed that can be extended to more complex devices employing electrostatic actuation. Fabricated suspended
more » ... suspended waveguides exhibit a loss of 2.2 dB/cm and tether pairs exhibit 0.25-dB additional loss. Index Terms-III-V semiconductors, indium phosphide (InP), InP microelecromechanical systems (MEMS), waveguides.
doi:10.1109/lpt.2004.826075 fatcat:bf4weimbszfjzpdmkiifdxdhnq