Tuning properties of long-period gratings by plasma post-processing of their diamond-like carbon nano-overlays

M Smietana, M Koba, P Mikulic, W J Bock
2014 Measurement science and technology  
This work presents an application of reactive ion etching (RIE) for effective tuning of spectral response and the refractive index (RI) sensitivity of diamond-like carbon (DLC) nano-coated long-period gratings (LPGs). When oxygen plasma is applied the technique allows for an efficient and well controlled etching of hard and chemically resistant DLC films deposited on optical fibers. We show that optical properties of DLC, especially its refractive index, strongly depend on thickness of the film
more » ... when it is thinner than 150 nm. The effect of DLC nano-coating deposition and etching on spectral properties of the LPGs is discussed. We have correlated the DLC properties with the shift of the LPG resonance wavelength and have found that both deposition and etching processes took place less effectively than on the electrode when the LPG sample was held above the electrode in the plasma reactor. An advantage of plasma-based etching is a capability for post-processing of the nano-coated structures with a good precision, as well as cleaning the samples and their re-coating according to requested needs. Moreover, the application of RIE allows for post-fabrication tuning of RI sensitivity of the DLC nano-coated LPGs.
doi:10.1088/0957-0233/25/11/114001 fatcat:rtqkzudtk5bsjidf4pyevfhsva