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Optical Thin Films and Applications
The emission distribution characteristics of an evaporation source can be used to define the correct geometry in the vacuum chamber for the production of uniform-thickness coatings. We first measured the thickness of coatings on test pieces positioned at known radial distances on a single rotation flat rack in the vacuum evaporation chamber and used these data in a computer program which found the source emission function, in the form cos Q φ, which provided the best fit to the data. φ is thedoi:10.1117/12.20387 fatcat:zp4ykz2hnzfutjvgbwjgd5uz5u