Low actuation voltage totally free flexible RF MEMS switch with antistiction system

S. Touati, N. Lorphelin, A. Kanciurzewski, R. Robin, A.-S. Rollier, O. Millet, K. Segueni
2008 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS  
This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding antistiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF measurements are presented and preliminary experimental protocol and results of anti-stiction validation
more » ... detailed. Resulting RF performances are -30dB of isolation and -0.45dB of insertion loss at 10 GHz. I.
doi:10.1109/dtip.2008.4752954 fatcat:dc773zwqlvf77ackoprcxeifvu