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Low actuation voltage totally free flexible RF MEMS switch with antistiction system
2008
2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Preserved Fulltext
This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding antistiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF measurements are presented and preliminary experimental protocol and results of anti-stiction validation
doi:10.1109/dtip.2008.4752954
fatcat:dc773zwqlvf77ackoprcxeifvu