A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL.
The file type is application/pdf.
Yusuke Teramoto, Takuma Yokoyama, Hiroshi Mizokoshi, Hiroto Sato, Kazuaki Hotta, Frank M. Schellenberg, Bruno M. La Fontaine. "Dependence of laser parameter on conversion efficiency in high-repetition-rate laser-ablation-discharge EUV source." Alternative Lithographic Technologies (2009)