Dependence of laser parameter on conversion efficiency in high-repetition-rate laser-ablation-discharge EUV source

Yusuke Teramoto, Takuma Yokoyama, Hiroshi Mizokoshi, Hiroto Sato, Kazuaki Hotta, Frank M. Schellenberg, Bruno M. La Fontaine
2009 Alternative Lithographic Technologies  
doi:10.1117/12.814460 fatcat:mzpggvg2ozapph2kg5j3cz3sda