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Large-area high-density helicon plasma sources
2010
Plasma Sources Science & Technology
High-density (10 12 -10 13 cm −3 ) helicon plasmas produced using two different but similar devices whose diameters are very large, 40 cm and 74 cm, respectively, have been characterized. A scaling of the particle production efficiency has been investigated in detail into a low aspect ratio (the ratio of the diameter to the axial length) region down to 0.075. It has been found that reducing this ratio manifests the standing wave-like patterns of the excited radio frequency (rf) fields. Spatial
doi:10.1088/0963-0252/19/3/034018
fatcat:ngibxbmguzh4fkiqmpfh2bt7lu