Attractive processing techniques for functional nanoparticle synthesis by thermal plasmas has been developed, because atmospheric pressure plasmas offer unique advantages; these advantages include high enthalpy to enhance the reaction kinetics, high chemical reactivity, oxidation and reduction atmospheres in accordance with required chemical reactions, and rapid quenching. These advantages bring the advances and demands in plasma processing for nanoparticle synthesis. In this paper, generation

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... f plasmas under atmospheric pressure and its characteristics is reviewed. Furthermore, plasma processing for functional nanoparticle synthesis of oxides, nitrides, carbides, and intermetallic compounds is reviewed to clarify the generation mechanisms. Numerical analysis is reviewed for intermetallic compound nanoparticle synthesis using an induction thermal plasma including the material evaporation and the nanoparticle growth with nucleation and co-condensation.